Varian, Inc.
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Vacuum Pumps
Rotary Vane Pumps
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Rotary Vane Pumps

Typical Applications

Analytical Instruments
Used in GC-MS, LC-MS, ICP-MS instruments, Varian’s DS Rotary Vane pumps are needed to rough the system and back the high vacuum turbo or diffusion pump.

Leak Detection
Rotary Vane pumps are typically used to back the helium mass spectrometer turbo or diffusion pump.

Electron Microscopes
Small pumps, typically the DS202 and the DS 302, are still used in competition with dry pumps to rough the system and the high vacuum turbo or diffusion pump.

Industrial Vacuum Processes
Vacuum coatings, metallurgy vacuum furnaces, lamps and tv tube manufacture, sterilizers, freeze dryers, glove boxes, high speed centrifuges, and flywheels (for energy storage) represent the main industrial applications for Varian’s DS Rotary Vane pumps.

High Energy Physics and Research Laboratories
Primarily used in combination with turbo pumps, Rotary Vane pumps are typically used to rough and pump high vacuum experimentatl chambers or to start ion pumps in ultra high vacuum systems.

Rotary Vane Pump



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Typical Applications